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PCB007-Mar2019

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44 PCB007 MAGAZINE I MARCH 2019 developed PC-10 to handle IC process equipment by separat- ing it into general classes. SECS II was a mandatory prerequisite of the equipment before an in- terface to PC-10 could be devel- oped (Figures 5 and 6). HP's approach to interfacing was to survey a representative number of processing systems within a class to develop a ge- neric model. A class is a group of equipment systems that op- erate similarly and perform the same general functions so that the communications require- ments look the same to PC-10. The assumption is that each piece of equipment in a class supports a subset of the SECS II data streams and functions that PC-10 supports for that class. HP also assumed that the order of the messages, which is not Figure 5: Real-time equipment status monitoring. (Source: Sematech Generic Equipment Model) Figure 6: In real-time monitoring of equipment, messages/requests are sent to the host, and replies contain recipes and instructions. (Source: Sematech Generic Equipment Model)

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