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SMT007-Dec2020

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80 SMT007 MAGAZINE I DECEMBER 2020 The CAF testing was performed on 10 sam- ples in a CTS CS-40/200 climate chamber using a Gen3 Systems Auto-SIR 256 with a 256-channel test rack. Sample preparation started with the measurement of the registra- tion on the electrical test structures included on the test vehicle. A maximum misregistra- tion of ≤60 µm was measured for the PTHs on three samples. For all other samples, as well as for all the buried vias on all samples, the misregistration was below the lowest detect- able level of 40 µm. Subsequently, the sam- ples were submitted to reflow simulation (six times reflow at 215°C). After reflow simula- tion, the samples were visually inspected and cleaned using isopropyl alcohol (IPA). Finally, the samples were placed in the oven for bak- ing (eight hours at 120°C). Table 6: Results of the electrical monitoring during thermal cycling (500 cycles from -55°C to +100°C). Table 7: Results of the electrical monitoring during thermal cycling (200 cycles from -60°C to +140°C).

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