PCB007 Magazine

PCB007-Aug2019

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AUGUST 2019 I PCB007 MAGAZINE 67 R-value of only 0.37 in the given example. The tops of the trenches were square-shaped. Process II was optimized to obtain square- shaped trenches. Inorganic components, Cu- SO 4 , acid, and chloride were optimized, as summarized in Figure 12. Lower CuSO4 and high acid gave a better trench shape than the high CuSO4 and low acid. Further, the physical properties of Process II were measured, specifically tensile strength Figure 11: Via fill and trace plate capability of Process II. Figure 12: Trace plate with varying VMS for Process II.

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