For more information, please contact Molly Gu | molly.gu@kla-tencor.com | www.kla.com
Orbotech
Ultra Dimension™ 900
Orbotech
Ultra PerFix™ 500P
INTRODUCING
Pattern & LV inspection
in a single scan
Advanced shaping for
fine line applications
AOI and AOS Solutions for the Most
Advanced IC Substrates
Designed for ultra fine pattern inspection and shaping
Overcome yield, throughput and quality challenges of
IC substrates manufacturing
Driven by innovative and field-proven KLA technologies