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Global MivaTek Global, LLC, 6 Dickinson Drive, Suite 218, Chadds Ford, PA 19317 Website: www.MivaTek.Global Contact: Brendan Hogan M (610) 620-3795 b.hogan@MivaTek.Global New Technology Release Light Engines 1 2 3 4 30Mj Resist 46 83 100 124 50Mj Resist 33 62 75 95 DI SM 25 47 57 73 New Light Engine Technology Digitally Adaptive Rasterization Technology Miva Technologies NextGen Light Engine is loaded with new features in support of its technical road- map. The NextGen is now available in all models. • Quad-wave Technology: Images everything - in a single machine. • DART™ Compliant: Scaling and line-width control tools that operate at 10X resolution for the most precise and repeatable total process. • New Vision System: Miva's new vision system sets the stage for its line-width measurement and Gerber driven metrology. • Increased camera FOV: Expanded FOV improves automation operation as well as eases panel alignment. • Resolutions: NextGen 15/30-micron available allows for high speeds and resolutions. High Power LED for 2x+ throughput: DART TM changes everything. Rasterization at 10X imaging resolution permits on the fly digital adjustments to line-width and scaling at 10X system resolution for hyper-precise feature/scale control. • TRUE Zone: Pre-rip scaling capabilities allow for true zone scaling in linear or non-linear algorithms at 10X system resolution. • Feature Tuning: Globally adjust feature sizes to include changes in develop or etch conditions in sub- pixel increments. DART Optimization Suite • FA Tool: Closed loop digital line-width compensation to include develop and etch process variation for first article or continuous. • Process Control Tools: Topographical mapping of develop and etch process variations for improved process control and AB etch uniformity. • Coming Soon: Integrated AB Registration Confirmation **18x24 panels per hour, both sides, 2400DT **Worldwide patents pending Booth #3225

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